About Us      

          Leuven Instruments strives to provide the most reliable equipment and customized process solutions for the integrated circuit (IC) manufacture industry. We developed state-of-the-art ion beam shaping (IBS) and ion beam deposition (IBD) equipment to support our customers addressing the critical challenges in logic, memory, power, optics, and micro-display device manufacture.

          Leuven Instruments also offers inductively coupled plasma etching (ICP), plasma enchanced chemical vapor deposition (PECVD), and vapor phase decomposition (VPD) equipment targeting IC manufacturing and metrology applications.