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LMEC-300™
LMEC-300™

RIE, IBS, PECVD

12" Special Metal Stack Etching Cluster

Pangea® A Series
Pangea® A Series

IBS

12" ION BEAM SHAPING SYSTEM

Lorem® A Series
Lorem® A Series

IBS

8" ION BEAM SHAPING SYSTEM

Ganister™ A Series
Ganister™ A Series

RIE, IBD

8" ION BEAM DEPOSITION SYSTEM

Herent® Chimera® A
Herent® Chimera® A

ICP

12" METAL HARDMASK OPENING SYSTEM

Herent® Chimera® M
Herent® Chimera® M

ICP, Strip

12" METAL ETCHING SYSTEM

Tebaank™ Pishow® P
Tebaank™ Pishow® P

ICP

8" SILICON ETCHING SYSTEM

Kessel™ Pishow® M
Kessel™ Pishow® M

ICP, Strip

8" METAL ETCHING SYSTEM

Kessel™ Pishow® M2
Kessel™ Pishow® M2

ICP, Strip

8" METAL ETCHING SYSTEM

Pishow® A Series
Pishow® A Series

ICP

8" INDUCTIVELY COUPLED PLASMA ETCHING SYSTEM

Pishow® D Series
Pishow® D Series

ICP

8" INDUCTIVELY COUPLED PLASMA - DEEP SILICON ETCHING SYSTEM

Haasrode® Avior® A
Haasrode® Avior® A

CCP

6" CAPACITIVELY COUPLED PLASMA ETCHING SYSTEM

Shale® C Series
Shale® C Series

ICP-CVD

8" INDUCTIVELY COUPLED PLASMA CHEMICAL VAPOR DEPOSITION SYSTEM

Shale® A Series
Shale® A Series

PECVD

Shale® A Series 8" PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION SYSTEM

Seehund® A Series
Seehund® A Series

VPD

VAPOR PHASE DECOMPOSITION SYSTEM

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